课程负责人：杨皓哲
课程介绍：（全英文教学） This course is designed primarily for graduate students and senior undergraduate students specializing in Integrated Circuit Science and Engineering. It also serves as an introductory course for students with backgrounds in electronics and materials physics. The focus of this course is on the construction of integrated circuits (ICs) and covers essential processes such as thin film deposition, lithography, doping, and etching.
面向对象：研究生、留学生
开课学年：2024-2025
开课学期：秋学期
课程号：D421051012
学分：2.0
课程类型：研究生课程
是否精品课程：否
课时：32.0
教材及参考书：<Silicon VLSI Technology, fundamentals, practice, and modeling>