Physics and technology of microelectronic fabrication

Release time:2024-09-01 Hits:

Leader of Teaching Group:杨皓哲

Course Introduction:（全英文教学） This course is designed primarily for graduate students and senior undergraduate students specializing in Integrated Circuit Science and Engineering. It also serves as an introductory course for students with backgrounds in electronics and materials physics. The focus of this course is on the construction of integrated circuits (ICs) and covers essential processes such as thin film deposition, lithography, doping, and etching.

Target Students:研究生、留学生

School Year:2024-2025

Semester:Autumn Term

Course number:D421051012

Credits:2.0

Course Type:Postgraduate Course:

Top-Quality Courses or Not:no

Required Class Hours:32.0

Courses and reference books:<Silicon VLSI Technology, fundamentals, practice, and modeling>