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影响因子：7.9
DOI码：10.1109/TASE.2025.3599216
所属单位：仪器科学与光电工程学院
教研室：大科学装置研究院
发表刊物：IEEE Transactions on Automation Science and Engineering
关键字：Magnetic levitation; Feedforward systems; Torque; Velocity control; active disturbance rejection control (ADRC); adaptive regulation; Fluctuations; incremental compensation; load torque observer; Motors; Observers; Permanent magnet synchronous motor (PMSM); Semiconductor device manufacture; Turbines; Valves
摘要：The magnetic levitation turbo molecular pump (MLTMP) is driven by a high-speed permanent magnet synchronous motor to create a high-vacuum environment for semiconductor manufacturing and other industries. When gas pressure changes abruptly, the MLTMP experiences significant speed fluctuations, which would degrade industrial productivity and even destabilize sensorless control. To address this issue, this paper proposes a high-dynamic speed control strategy for high-speed MLTMP under impact load disturbances. First, a speed control method incorporating a load torque observer and an active distur
合写作者：Gengkui Wei, Baodong Chen, Haifeng Zhang
第一作者：Shiqiang Zheng
论文类型：期刊论文
学科门类：工学
一级学科：仪器科学与技术
文献类型：期刊
卷号：22
页面范围：19901-19911
ISSN号：1558-3783
是否译文：否
发表时间：2025-01-01