Impact Factor:7.9

DOI number:10.1109/TASE.2025.3599216

Affiliation of Author(s):仪器科学与光电工程学院

Teaching and Research Group:大科学装置研究院

Journal:IEEE Transactions on Automation Science and Engineering

Key Words:Magnetic levitation; Feedforward systems; Torque; Velocity control; active disturbance rejection control (ADRC); adaptive regulation; Fluctuations; incremental compensation; load torque observer; Motors; Observers; Permanent magnet synchronous motor (PMSM); Semiconductor device manufacture; Turbines; Valves

Abstract:The magnetic levitation turbo molecular pump (MLTMP) is driven by a high-speed permanent magnet synchronous motor to create a high-vacuum environment for semiconductor manufacturing and other industries. When gas pressure changes abruptly, the MLTMP experiences significant speed fluctuations, which would degrade industrial productivity and even destabilize sensorless control. To address this issue, this paper proposes a high-dynamic speed control strategy for high-speed MLTMP under impact load disturbances. First, a speed control method incorporating a load torque observer and an active distur

Co-author:Gengkui Wei, Baodong Chen, Haifeng Zhang

First Author:Shiqiang Zheng

Indexed by:Journal paper

Discipline:工学

First-Level Discipline:Instrumentation Science and Technology

Document Type:J

Volume:22

Page Number:19901-19911

ISSN No.:1558-3783

Translation or Not:no

Date of Publication:2025-01-01