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3D Heterogeneous Integration of Silicon Nitride and Aluminum Nitride on Sapphire toward Ultrawideband Photonics Integrated Circuits

Release time:2026-04-17| Hits:

DOI number:10.1021/acsphotonics.4c02556

Journal:ACS Photonics

Indexed by:Journal paper

Volume:12

Issue:5

Page Number:2538–2547

Translation or Not:no

Date of Publication:2026-02-19