Paper
Multi-functional dual-path self-aligned polarization interference lithography
Release time:2023-07-23 Hits:Impact Factor:3.833
DOI number:10.1364/OE.489049
Journal:Optics Express
Indexed by:Journal paper
Volume:31
Issue:11
Page Number:17629-17644
Translation or Not:no
Date of Publication:2023-05-10
Included Journals:SCI
Links to published journals:https://doi.org/10.1364/OE.489049
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