DOI number: 10.1088/1361-6595/ac9752

Journal: Plasma Sources Science and Technology

Key Words: anode double layer, ion beam, PIC-MCC simulation, plasma diagnostics, BP-HiPIMS

First Author: Mingyue Han

Indexed by: Journal paper

First-Level Discipline: Physics

Document Type: J

Volume: 31

Page Number: 105014

Number of Words: 12000

Translation or Not: no

Date of Publication: 2022-10-27

Included Journals: SCI

Links to published journals: https://iopscience.iop.org/article/10.1088/1361-6595/ac9752